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App. No. 11/318,508 · Confirmation No. 7085

Baking apparatus used in photolithography process, and method for controlling critical dimension of photoresist patterns using the same

Inventor: Dong Jin Lee
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2009-09-29 ABN Abandonment 2 View
2009-03-18 CTNF Non-Final Rejection 5 View
2009-03-18 892 List of references cited by examiner 1 View
2009-03-18 FWCLM Index of Claims 1 View
2009-03-18 SRFW Search information including classification, databases and other search related notes 1 View
2009-02-09 ELC. Response to Election / Restriction Filed 2 View
2009-02-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-01-12 CTRS Requirement for Restriction/Election 6 View
2009-01-12 FWCLM Index of Claims 1 View
2009-01-12 BIB Bibliographic Data Sheet 1 View
2007-08-02 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2007-06-28 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2007-06-21 PA.. Power of Attorney 2 View
2007-06-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-03-22 PETDEC Petition Decision 2 View
2007-03-16 N578 Notification of Withdrawal of Attorney 1 View
2007-03-16 BIB Bibliographic Data Sheet 1 View
2006-08-23 PET.OP Petition for review by the Office of Petitions 2 View
2006-08-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2005-12-28 TRNA Transmittal of New Application 2 View
2005-12-28 SPEC Specification 6 View
2005-12-28 CLM Claims 3 View
2005-12-28 ABST Abstract 1 View
2005-12-28 DRW Drawings-only black and white line drawings 2 View
2005-12-28 OATH Oath or Declaration filed 3 View
2005-12-28 WFEE Fee Worksheet (SB06) 1 View
2005-12-28 WFEE Fee Worksheet (SB06) 1 View
2005-12-28 ADS Application Data Sheet 2 View
2005-12-28 FRPR Certified Copy of Foreign Priority Application 17 View
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Quick Facts
App. No.
11/318,508
Filed
2005-12-28
Pub. No.
US20060154479A1
Art Unit
1795