Patent Assignment
Reel/Frame 017429/0717
Assignment of Assignor's Interest
Recorded: 2005-12-27
Pages: 7
Assignors
SCHMIDT, MARTIN
Executed: 2005-12-23
LEBERT, RAINER-HELMUT
Executed: 2005-12-22
STAMM, UWE
Executed: 2005-12-22
Assignees
XTREME TECHNOLOGIES GMBH
GOESCHWITZER STRASSE 25, D-07745 JENA, GERMANY
COMMISSARIAT A L'ENERGIE ATOMIQUE
31, RUE DE LA FEDERATION, F-75015 PARIS, FRANCE
AIXUV GMBH
STEINBACHSTRASSE 15, D-52074 AACHEN, GERMANY
Covered Property
(1)
Method and Device for Producing Extreme Ultraviolet Radiation or Soft X-Ray Radiation
Related Assignments
(6)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignee's Change of Address
Sep 24, 2009
From: XTREME TECHNOLOGIES GMBH
To: XTREME TECHNOLOGIES GMBH
Reel/Frame 023279/0531 →
Change of Assignee's Address
Oct 25, 2011
From: XTREME TECHNOLOGIES GMBH
To: XTREME TECHNOLOGIES GMBH
Reel/Frame 027114/0810 →
Assignment of Assignor's Interest
Jun 5, 2012
From: AIXUV GMBH
To: BRUKER ADVANCED SUPERCON GMBH
Reel/Frame 028318/0671 →
Assignment of Assignor's Interest
Jan 17, 2014
From: XTREME TECHNOLOGIES GMBH
To: USHIO DENKI KABUSHIKI KAISHA
Reel/Frame 032086/0615 →
Assignment of Assignor's Interest
Jun 5, 2015
From: BRUKER ADVANCED SUPERCONGMBH
To: RI RESEARCH INSTRUMENTS GMBH
Reel/Frame 035793/0380 →
Assignment of Assignor's Interest
Dec 19, 2018
From: COMMISSARIAT A L'ENERGIE ATOMIQUE (CEA)
To: RI RESEARCH INSTRUMENTS GMBH; USHIO DENKI KABUSHIKI KAISHA
Reel/Frame 048829/0753 →