Patent Assignment
Reel/Frame 017452/0057
Assignment of Assignor's Interest
Recorded: 2006-01-04
Pages: 4
Assignors
LEE, HONG-JI
Executed: 2005-12-14
LEE, CHUN-HUNG
Executed: 2005-12-14
LIAN, NAN-TSU
Executed: 2005-12-14
Assignee
MACRONIX INTERNATIONAL CO., LTD.
NO. 16, LI-HSIN ROAD, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, TAIWAN
Covered Property
(1)
Method and Apparatus for Dielectric Etching During Integrated Circuit Fabrication