Patent Assignment
Reel/Frame 017573/0649
Assignment of Assignor's Interest
Recorded: 2006-02-14
Pages: 3
Assignee
XTREME TECHNOLOGIES GMBH
GOESCHWITZER STRASSE 25, D-07745 JENA, GERMANY
Covered Property
(1)
Device and Method for Generating Extreme Ultraviolet (Euv) Radiation
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.