Patent Assignment
Reel/Frame 017667/0418
Assignment of Assignor's Interest
Recorded: 2006-03-09
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Temperature Control System and Substrate Processing Apparatus