Patent Assignment
Reel/Frame 017715/0577
Assignment of Assignor's Interest
Recorded: 2006-06-02
Pages: 5
Assignors
LIU, WEI
Executed: 2004-10-11
HE, JIM ZHONGYI
Executed: 2004-10-11
AHN, SANG H.
Executed: 2004-10-14
SHEN, MEIHUA
Executed: 2004-10-11
M'SAAD, HICHEM
Executed: 2004-10-08
YEH, WENDY H.
Executed: 2004-10-01
BENCHER, CHRISTOPHER D.
Executed: 2004-10-11
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, PATENT COUNSEL, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Techniques for the Use of Amorphous Carbon (Apf) for Various Etch and Litho Integration Schemes