Patent Assignment
Reel/Frame 017723/0133
Assignment of Assignor's Interest
Recorded: 2006-03-22
Pages: 7
Assignors
SAKTHIVEL, PALANIKUMARAN
Executed: 2006-03-16
BUCKLEY, THOMAS J.
Executed: 2006-03-17
BECKNELL, ALAN F.
Executed: 2006-03-17
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Processes for Monitoring the Levels of Oxygen and/or Nitrogen Species in a Substantially Oxygen and Nitrogen-Free Plasma Ashing Process
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement
May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →