Patent Assignment
Reel/Frame 017788/0837
Assignment of Assignor's Interest
Recorded: 2006-04-17
Pages: 3
Assignees
CANON KABUSHIKIK KAISHA
3-30-2, SHIMOMARUKO, OHTA-KU, TOKYO, JAPAN
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Aberration Measuring Apparatus for Charged Particle Beam Optical System, Charged Particle Beam Lithography Machine Having the Aberration Measuring Apparatus, and Device Fabrication Method Using the Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.