Patent Assignment
Reel/Frame 017840/0207
Assignment of Assignor's Interest
Recorded: 2006-06-23
Pages: 3
Assignors
HERGENHAN, DR. GUIDO
Executed: 2006-06-16
ZIENER, DR. CHRISTIAN
Executed: 2006-06-16
KLEINSCHMIDT, DR. JUERGEN
Executed: 2006-06-16
Assignee
XTREME TECHNOLOGIES GMBH
GOESCHWITZER STRASSE 25, JENA, D-07745, GERMANY
Covered Property
(1)
Arrangement and Method for the Generation of Extreme Ultraviolet Radiation
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Corrective Assignment to Correct the Execution Dates of the Three Inventors to 05/16/2006 from 06/16/2006 Previously Recorded on Reel 017840 Frame 0207. Assignor(S) Hereby Confirms the Correct Execution Date Is 05/16/2006.
Jul 27, 2006
From: HERGENHAN, DR. GUIDO; ZIENER, DR. CHRISTIAN; KLEINSCHMIDT, DR. JUERGEN
To: XTREME TECHNOLOGIES GMBH
Reel/Frame 018011/0216 →
Change of Assignee's Address
Oct 26, 2011
From: XTREME TECHNOLOGIES GMBH
To: XTREME TECHNOLOGIES GMBH
Reel/Frame 027121/0006 →
Assignment of Assignor's Interest
Jan 17, 2014
From: XTREME TECHNOLOGIES GMBH
To: USHIO DENKI KABUSHIKI KAISHA
Reel/Frame 032086/0615 →