Patent Assignment
Reel/Frame 017904/0198
Assignment of Assignor's Interest
Recorded: 2006-05-23
Pages: 2
Assignee
ASML MASKTOOLS B.V.
P.O. BOX VELDHOVEN, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method, Program Product and Apparatus for Optimizing Illumination for Full-Chip Layer
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.