Patent Assignment
Reel/Frame 017934/0666
Assignment of Assignor's Interest
Recorded: 2006-06-01
Pages: 3
Assignors
CHEN, JANG FUNG
Executed: 2006-04-24
BERGER, GABRIEL
Executed: 2006-05-02
COSKUN, TAMER
Executed: 2006-04-24
PARK, SANGBONG
Executed: 2006-04-30
CHEN, TING
Executed: 2006-04-30
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method, Program Product and Apparatus for Improving Calibration of Resist Models Used in Critical Dimension Calculation
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.