Patent Assignment
Reel/Frame 018007/0671
Assignment of Assignor's Interest
Recorded: 2006-05-18
Pages: 3
Assignors
MAEKAWA, SHINJI
Executed: 2006-03-08
YAMAZAKI, SHUNPEI
Executed: 2006-03-14
SHOJI, HIRONOBU
Executed: 2006-03-15
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device