Method for manufacturing semiconductor device
View Patent ↗In the present circumstances, a film formation method of using spin coating in a manufacturing process is heavily used. As increasing the substrate size in future, the film formation method of using spin coating becomes at a disadvantage in mass production since a mechanism for rotating a large substrate becomes large, and there is many loss of material solution or waste liquid. According to the present invention, in a manufacturing process of a semiconductor device, a microscopic wiring pattern can be realized by delivering selectively photosensitive conductive material solution by droplet discharging, exposing selectively to laser light or the like, and developing. The present invention can reduce drastically costs since a patterning process can be shortened and an amount of material in a process of forming a conductive pattern can be reduced. Accordingly, the present invention can be applied to manufacture a large substrate.
1. A method for manufacturing a semiconductor device comprising:
forming a base layer comprising a photocatalyst material on an insulating surface of a substrate, wherein the photocatalyst material is selected from the group consisting of titanium oxide (TiO x ), strontium titanate (SrTiO 3 ), cadmium selenide (CdSe), potassium tantalate (KTaO 3 ), cadmium sulfide (CdS), zirconium oxide (ZrO 2 ), niobium oxide (Nb 2 O 5 ), zinc oxide (ZnO), iron oxide (Fe 2 O 3 ) and tungsten oxide (WO 3 );
forming a first conductive film pattern by discharging a conductive material containing a photosensitive material on the base layer by droplet discharging;
selectively exposing the first conductive film pattern to laser light; and
forming a second conductive film pattern by developing the exposed first conductive film pattern.
2. A method for manufacturing a semiconductor device according to claim 1 , wherein the conductive material containing the photosensitive material comprises a material selected from the group consisting of Ag, Au, Cu, Ni, Al or Pt, and a compound thereof.
3. A method for manufacturing a semiconductor device according to claim 1 , wherein the photosensitive material is a negative type photosensitive material.
4. A method for manufacturing a semiconductor device according to claim 1 , wherein the photosensitive material is a positive type photosensitive material.
5. A method for manufacturing a semiconductor device according to claim 1 , wherein a transition metal is doped into the photocatalyst material.
6. A method for manufacturing a semiconductor device comprising:
forming a base layer comprising a photocatalyst material on an insulating surface of a substrate, wherein the photocatalyst material is selected from the group consisting of titanium oxide (TiO x ), strontium titanate (SrTiO 3 ), cadmium selenide (CdSe), potassium tantalate (KTaO 3 ), cadmium sulfide (CdS), zirconium oxide (ZrO 2 ), niobium oxide (Nb 2 O 5 ), zinc oxide (ZnO), iron oxide (Fe 2 O 3 ) and tungsten oxide (WO 3 );
forming a first conductive film pattern by discharging a conductive material containing a photosensitive material on the base layer by droplet discharging;
selectively exposing the first conductive film pattern to laser light;
forming a second conductive film pattern having a narrower width than that of the first conductive film pattern by developing the exposed first conductive film pattern;
forming a gate insulating film covering the second conductive film pattern; and
forming a semiconductor film over the gate insulating film.
7. A method for manufacturing a semiconductor device according to claim 6 , wherein the conductive material containing the photosensitive material comprises a material selected from the group consisting of Ag, Au, Cu, Ni, Al or Pt, and a compound thereof.
8. A method for manufacturing a semiconductor device according to claim 6 , wherein the photosensitive material is a negative type photosensitive material.
9. A method for manufacturing a semiconductor device according to claim 6 , wherein the photosensitive material is a positive type photosensitive material.
10. A method for manufacturing a semiconductor device according to claim 6 , wherein a transition metal is doped into the photocatalyst material.
11. A method for manufacturing a semiconductor device comprising:
forming a base layer comprising a photocatalyst material on an insulating surface of a substrate, wherein the photocatalyst material is selected from the group consisting of titanium oxide (TiO x ), strontium titanate (SrTiO 3 ), cadmium selenide (CdSe), potassium tantalate (KTaO 3 ), cadmium sulfide (CdS), zirconium oxide (ZrO 2 ), niobium oxide (Nb 2 O 5 ), zinc oxide (ZnO), iron oxide (Fe 2 O 3 ) and tungsten oxide (WO 3 );
forming a first conductive film pattern by discharging a conductive material containing a photosensitive material on the base layer by droplet discharging;
selectively exposing the first conductive film pattern to laser light;
forming a gate electrode by developing the exposed first conductive film pattern;
forming a gate insulating film covering the gate electrode;
forming a first semiconductor film over the gate insulating film;
forming a second conductive film pattern by discharging a conductive material containing a positive type photosensitive material over the first semiconductor film;
exposing a selected portion of the second conductive film pattern to laser light;
forming a source wiring and a drain wiring by developing the exposed second conductive film pattern; and
etching the first semiconductor film using the source wiring and the drain wiring as masks.
12. A method for manufacturing a semiconductor device according to claim 11 , further comprising a step of forming a second semiconductor film containing an impurity element imparting n-type or p-type conductivity over the first semiconductor film.
13. A method for manufacturing a semiconductor device according to claim 12 , further comprising a step of etching the second semiconductor film using the source wiring and the drain wiring as masks.
14. A method for manufacturing a semiconductor device according to claim 11 , wherein the conductive material containing the positive type photosensitive material is discharged by droplet discharging.
15. A method for manufacturing a semiconductor device according to claim 11 , wherein a transition metal is doped into the photocatalyst material.
16. A method for manufacturing a semiconductor device comprising:
forming a base layer comprising a photocatalyst material on a first surface of a substrate, wherein the photocatalyst material is selected from the group consisting of titanium oxide (TiO x ), strontium titanate (SrTiO 3 ), cadmium selenide (CdSe), potassium tantalate (KTaO 3 ), cadmium sulfide (CdS), zirconium oxide (ZrO 2 ), niobium oxide (Nb 2 O 5 ), zinc oxide (ZnO), iron oxide (Fe 2 O 3 ) and tungsten oxide (WO 3 );
forming a first conductive film pattern by discharging a conductive material containing a photosensitive material on the base layer by droplet discharging;
selectively exposing the first conductive film pattern to laser light;
forming a gate electrode by developing the exposed first conductive film pattern;
forming a gate insulating film covering the gate electrode;
forming a first semiconductor film over the gate insulating film;
forming a second conductive film pattern by discharging a conductive material containing a negative type photosensitive material over the first semiconductor film;
exposing a portion of the second conductive film pattern to laser light by emitting the laser light from a side of a second surface of the substrate using the gate electrode as a mask wherein the second surface is opposite to the first surface;
forming a source wiring and a drain wiring by developing the exposed second conductive film pattern; and
etching the first semiconductor film using the source wiring and the drain wiring as masks.
17. A method for manufacturing a semiconductor device according to claim 16 , wherein the substrate has an insulating surface.
18. A method for manufacturing a semiconductor device according to claim 16 , further comprising a step of forming a second semiconductor film containing an impurity element imparting n-type or p-type conductivity over the first semiconductor film.
19. A method for manufacturing a semiconductor device according to claim 18 , further comprising a step of etching the second semiconductor film using the source wiring and the drain wiring as masks.
20. A method for manufacturing a semiconductor device according to claim 16 , wherein the conductive material containing the negative type photosensitive material is discharged by droplet discharging.
21. A method for manufacturing a semiconductor device according to claim 16 , wherein the source electrode and the drain electrode are formed in a self aligning manner to have a space therebetween that is the same as a width of the gate electrode.
22. A method for manufacturing a semiconductor device according to claim 16 , wherein a transition metal is doped into the photocatalyst material.