IP Library Assignment 018016/0557
Patent Assignment
Reel/Frame 018016/0557

Assignment of Assignor's Interest

Recorded: 2006-06-21 Pages: 5
Assignors
HATAMURA, YASUNORI
Executed: 2006-02-15
HINATA, KUNIHKO
Executed: 2006-05-18
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME,, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property (1)
Method and Apparatus for Reducing Substrate Backside Deposition During Processing
Patent: 8,382,942 →
Application: 10/549,283 →
Publication: US 2007/0000614
Related Assignments (1)
Other recorded transfers of the patent in this record — the chain of ownership.
Corrective Assignment to Correct the 1ST and 2ND Assignors Execution Dates. Document Previously Recorded at Reel 018016 Frame 0557. Sep 7, 2006
From: HATAMURA, YASUNORI; HINATA, KUNIHKO
To: TOKYO ELECTRON LIMITED
Reel/Frame 018280/0714 →