Patent Assignment
Reel/Frame 018016/0557
Assignment of Assignor's Interest
Recorded: 2006-06-21
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME,, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method and Apparatus for Reducing Substrate Backside Deposition During Processing
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.