Patent Assignment
Reel/Frame 018280/0714
Corrective Assignment to Correct the 1ST and 2ND Assignors Execution Dates. Document Previously Recorded at Reel 018016 Frame 0557.
Recorded: 2006-09-07
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method and Apparatus for Reducing Substrate Backside Deposition During Processing
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.