Patent Assignment
Reel/Frame 018023/0082
Assignment of Assignor's Interest
Recorded: 2006-06-27
Pages: 2
Assignor
KANEYAMA, KOJI
Executed: 2006-06-19
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Drying Apparatus, Substrate Cleaning Apparatus and Substrate Processing System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.