Patent Assignment
Reel/Frame 019370/0854
Assignment of Assignor's Interest
Recorded: 2007-06-01
Pages: 3
Assignor
DAINIPPON SCREEN MFG. CO., LTD.
Executed: 2007-04-09
Assignee
SOKUDO CO., LTD.
K-I SHIJO BUILDING, 88 KANKOBOKO-CHO, SHIJODORI-MUROMACHI-HIGASHIIRU, SHIMOGYO-KU, KYOTO, 600-8009, JAPAN
Covered Property
(1)
Substrate Drying Apparatus, Substrate Cleaning Apparatus and Substrate Processing System
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.