Patent Assignment
Reel/Frame 018069/0095
Assignment of Assignor's Interest
Recorded: 2006-07-13
Pages: 3
Assignors
KOBAYASHI, YASUO
Executed: 2006-03-01
NISHIZAWA, KENICHI
Executed: 2006-03-26
KAMESHIMA, TAKATOSHI
Executed: 2006-04-14
MATSUOKA, TAKAAKI
Executed: 2006-03-06
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-KU, JAPAN
Covered Property
(1)
Manufacturing Method of Semiconductor Device and Film Deposition System