Patent Assignment
Reel/Frame 018074/0552
Assignment of Assignor's Interest
Recorded: 2006-08-07
Pages: 2
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTO-KANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus , Substrate Holder, and Manufacturing Method of Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.