Patent Assignment
Reel/Frame 018116/0142
Assignment of Assignor's Interest
Recorded: 2006-07-19
Pages: 3
Assignors
KIM, IN-GI
Executed: 2006-05-09
HWANG, IN-SEAK
Executed: 2006-05-09
CHUNG, DAE-HYUK
Executed: 2006-05-09
KIM, KYOUNG-HWAN
Executed: 2006-05-09
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus and Method for Removing a Photoresist Structure from a Substrate