Patent Assignment
Reel/Frame 018134/0723
Assignment of Assignor's Interest
Recorded: 2006-08-17
Pages: 8
Assignors
WAGNER, CHRISTIAN
Executed: 2006-07-27
GERHARD, MICHAEL
Executed: 2006-07-13
RICHTER, GERALD
Executed: 2006-07-12
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Catadioptric Projection Objective with Adaptive Mirror and Projection Exposure Method
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.