Patent Assignment
Reel/Frame 018205/0818
Assignment of Assignor's Interest
Recorded: 2006-08-23
Pages: 3
Assignee
BROOKS AUTOMATION, INC.
15 ELIZABETH DRIVE, CHELMSFORD, MASSACHUSETTS, 01824
Covered Property
(1)
Substrate processing apparatus
Application:
11/441,711 →
Publication:
US 2007/0183871
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.