Patent Assignment
Reel/Frame 018242/0215
Assignment of Assignor's Interest
Recorded: 2006-09-13
Pages: 2
Assignor
HAMADA, TETSUYA
Executed: 2006-08-14
Assignee
DAINIPPON SCREEN MFG. CO., LTD
TENJINKITA-CHO 1-1, TERANOUCHI-AGARU 4-CHOME,, HORIKAWA-DORI, KAMIGYO-KU, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Apparatus for and Method of Processing Substrate Subjected to Exposure Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.