Patent Assignment
Reel/Frame 018378/0546
Assignment of Assignor's Interest
Recorded: 2006-10-04
Pages: 5
Assignors
NGUYEN, TUE
Executed: 2006-09-05
NGUYEN, TAI DUNG
Executed: 2006-09-05
BERCAW, CRAIG ALAN
Executed: 2006-09-05
Assignee
TEGAL CORPORATION
2201 SOUTH MCDOWELL BOULEVARD, PETALUMA, CALIFORNIA, 94954
Covered Property
(1)
System and Method for Semiconductor Processing
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.