Patent Assignment
Reel/Frame 018396/0020
Assignment of Assignor's Interest
Recorded: 2006-10-13
Pages: 3
Assignor
SINGER, WOLFGANG
Executed: 2006-10-04
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR. 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Illumination System Having a More Efficient Collector Optic
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.