Patent Assignment
Reel/Frame 018397/0952
Assignment of Assignor's Interest
Recorded: 2006-10-17
Pages: 2
Assignor
FIOLKA, DAMIAN
Executed: 2006-09-21
Assignee
CARL ZEISS SMT AB
RUDOLF-EBERSTR 2, OBERKOCHEN, 73446, GERMANY
Covered Property
(1)
Microlithographic Projection Exposure Apparatus with Immersion Projection Lens
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Corrective Assignment to Correct the the Receiving Party Name Carl Zeiss Smt Ab Previously Recorded on Previously Recorded on Reel 018397 Frame 0952. Assignor(S) Hereby Confirms the Correct Spelling of the Receiving Party Name Is Carl Zeiss Smt Ag.
Nov 13, 2006
From: FIOLKA, DAMIAN
To: CARL ZEISS SMT, AG
Reel/Frame 018511/0942 →
A Modifying Conversion
Jan 18, 2011
From: CARL ZEISS SMT AG
To: CARL ZEISS SMT GMBH
Reel/Frame 025763/0367 →