Patent Assignment
Reel/Frame 018511/0942
Corrective Assignment to Correct the the Receiving Party Name Carl Zeiss Smt Ab Previously Recorded on Previously Recorded on Reel 018397 Frame 0952. Assignor(S) Hereby Confirms the Correct Spelling of the Receiving Party Name Is Carl Zeiss Smt Ag.
Recorded: 2006-11-13
Pages: 4
Assignor
FIOLKA, DAMIAN
Executed: 2006-09-21
Assignee
CARL ZEISS SMT, AG
RUDOLF-EBERSTR 2, OBERKOCHEN, 73446, GERMANY
Covered Property
(1)
Microlithographic Projection Exposure Apparatus with Immersion Projection Lens
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.