Patent Assignment
Reel/Frame 018473/0289
Assignment of Assignor's Interest
Recorded: 2006-10-30
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Thermal Processing System for Curing Dielectric Films
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.