Patent Assignment
Reel/Frame 022373/0308
Assignment of Assignor's Interest
Recorded: 2009-03-10
Pages: 3
Assignors
LEE, ERIC M
Executed: 2009-03-02
LIU, JUNJUN
Executed: 2009-03-02
TOMA, DOREL I
Executed: 2009-03-02
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Thermal Processing System for Curing Dielectric Films
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.