Patent Assignment
Reel/Frame 018489/0730
Assignment of Assignor's Interest
Recorded: 2006-10-31
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods of Fabricating a Barrier Layer with Varying Composition for Copper Metallization