Patent Assignment
Reel/Frame 018593/0717
Assignment of Assignor's Interest
Recorded: 2006-11-09
Pages: 4
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, 100-0004, JAPAN
Covered Property
(1)
Rework Process for Photoresist Film