Patent Assignment
Reel/Frame 018753/0068
Assignment of Assignor's Interest
Recorded: 2006-12-27
Pages: 2
Assignee
KOMATSU DENSHI KINZOKU KABUSHIKI KAISHA
25-1, SHINOMIYA 3-CHOME, HIRATSUKA-SHI, KANAGAWA, 254-0014, JAPAN
Covered Property
(1)
Method and Apparatus for Collecting Chemicals from Semiconductor Wafer
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.