Patent Assignment
Reel/Frame 023911/0377
Change of Name
Recorded: 2010-02-08
Pages: 16
Assignor
KOMATSU DENSHI KINZOKU KABUSHIKI KAISHA
Executed: 2007-01-01
Assignee
SUMCO TECHXIV CORPORATION
1324-2, MASURAGAHARA-MACHI,, OMURA-SHI, NAGASAKI, JAPAN
Covered Property
(1)
Method and Apparatus for Collecting Chemicals from Semiconductor Wafer
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.