Patent Assignment
Reel/Frame 018784/0317
Assignment of Assignor's Interest
Recorded: 2007-01-17
Pages: 4
Assignors
KALLER, JULIAN
Executed: 2006-12-07
FINK, HERBERT
Executed: 2006-12-07
ZACZEK, CHRISTOPH
Executed: 2006-12-08
RUPP, WOLFGANG
Executed: 2006-12-20
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Devices and Methods for Inspecting Optical Elements with a View to Contamination
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.