Patent Assignment
Reel/Frame 018820/0063
Address Correction for Assignee
Recorded: 2007-01-24
Pages: 4
Assignor
CARL ZEISS SMT AG
Executed: 2006-12-07
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Devices and Methods for Inspecting Optical Elements with a View to Contamination
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.