Patent Assignment
Reel/Frame 018819/0247
Assignment of Assignor's Interest
Recorded: 2007-01-23
Pages: 3
Assignor
SOCHA, ROBERT JOHN
Executed: 2007-01-22
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method, Program Product and Apparatus for Model Based Geometry Decomposition for Use in a Multiple Exposure Process
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.