Patent Assignment
Reel/Frame 019032/0192
Assignment of Assignor's Interest
Recorded: 2007-03-13
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8484, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Temperature Control Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.