Patent Assignment
Reel/Frame 019249/0305
Correction Requested to Reel 019032/Frame 0192 to Correct the Assignee's Zip Code
Recorded: 2007-05-03
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Temperature Control Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.