Assignment of Assignor's Interest

Recorded: 2007-03-29 Pages: 4

Assignors

ZIENER, CHRISTIAN, DR.

Executed: 2007-02-21

HERGENHAN, GUIDO, DR.

Executed: 2007-02-21

FLOHRER, FRANK

Executed: 2007-02-21

THODE, CARSTEN

Executed: 2007-02-21

Assignee

XTREME TECHNOLOGIES GMBH

GOESCHWITZER STRASSE 25, JENA, D-07745, GERMANY

Covered Property (1)

Arrangement for Generating Extreme Ultraviolet Radiation Based on an Electrically Operated Gas Discharge

Patent: 7,477,673 →

Application: 11/693,169 →

Publication: US 2007/0228299

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.