Patent Assignment
Reel/Frame 019145/0375
Assignment of Assignor's Interest
Recorded: 2007-04-11
Pages: 3
Assignee
XTREME TECHNOLOGIES GMBH
GOESCHWITZER STRASSE 25, JENA, D-07745, GERMANY
Covered Property
(1)
Arrangement for Generating Extreme Ultraviolet Radiation from a Plasma Generated by an Energy Beam with High Conversion Efficiency and Minimum Contamination
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.