Patent Assignment
Reel/Frame 019222/0588
Assignment of Assignor's Interest
Recorded: 2007-04-27
Pages: 2
Assignors
NAGATOMO, WATARU
Executed: 2007-01-24
MIYAMOTO, ATSUSHI
Executed: 2007-01-30
MOROKUMA, HIDETOSHI
Executed: 2007-01-25
Assignee
HITACHI-HIGH TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI, 1-CHOME,, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Monitoring Cross-Sectional Shape of a Pattern Formed on a Semiconductor Device
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Corrected Assignment to Correctly List Inventors and Application Serial Number Previously Recorded at Reel 019222, Frame 0441.
Mar 23, 2010
From: NAGATOMO, WATARU; MIYAMOTO, ATSUSHI; MOROKUMA, HIDETOSHI
To: HITACHI HIGH-TECHNOLOGIES CORPORATION
Reel/Frame 024159/0664 →
Change of Name and Address
Mar 30, 2020
From: HITACHI HIGH-TECHNOLOGIES CORPORATION
To: HITACHI HIGH-TECH CORPORATION
Reel/Frame 052259/0227 →