Patent Assignment
Reel/Frame 024159/0664
Corrected Assignment to Correctly List Inventors and Application Serial Number Previously Recorded at Reel 019222, Frame 0441.
Recorded: 2010-03-23
Pages: 3
Assignors
NAGATOMO, WATARU
Executed: 2007-01-24
MIYAMOTO, ATSUSHI
Executed: 2007-01-30
MOROKUMA, HIDETOSHI
Executed: 2007-01-25
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI, MINATO-KU, TOKYO 105-8717, JAPAN
Covered Property
(1)
Method and Apparatus for Monitoring Cross-Sectional Shape of a Pattern Formed on a Semiconductor Device
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Apr 27, 2007
From: NAGATOMO, WATARU; MIYAMOTO, ATSUSHI; MOROKUMA, HIDETOSHI
To: HITACHI-HIGH TECHNOLOGIES CORPORATION
Reel/Frame 019222/0588 →
Change of Name and Address
Mar 30, 2020
From: HITACHI HIGH-TECHNOLOGIES CORPORATION
To: HITACHI HIGH-TECH CORPORATION
Reel/Frame 052259/0227 →