Patent Assignment
Reel/Frame 019233/0009
Assignment of Assignor's Interest
Recorded: 2007-05-01
Pages: 3
Assignor
OWEN, DAVID
Executed: 2007-04-17
Assignee
ULTRATECH, INC.
3050 ZANKER ROAD, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Determination of Lithography Misalignment Based on Curvature and Stress Mapping Data of Substrates
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.