Patent Assignment
Reel/Frame 052594/0086
Assignment of Assignor's Interest
Recorded: 2020-05-07
Pages: 9
Assignor
VEECO INSTRUMENTS INC.
Executed: 2020-04-24
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, LEGAL DEPARTMENT, MILPITAS, CALIFORNIA, 95035
Covered Properties
(9)
Real-Time Evaluation of Stress Fields and Properties in Line Features Formed on Substrates
Patent:
6,600,565 →
Application:
09/560,719 →
Coherent Gradient Sensing Ellipsometer
Technique for Determining Curvatures of Embedded Line Features on Substrates
Determining Large Deformations and Stresses of Layered and Graded Structures to Include Effects of Body Forces
Systems for Measuring Stresses in Line Features Formed on Substrates
Full-Field Optical Measurements of Surface Properties of Panels, Substrates and Wafers
Determination of Lithography Misalignment Based on Curvature and Stress Mapping Data of Substrates
Polarization-Based Coherent Gradient Sensing Systems and Methods
Systems and methods of characterizing process-induced wafer shape for process control using CGS interferometry
Related Assignments
(3)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
May 12, 2016
From: STITES, DAVID G.
To: ULTRATECH, INC.
Reel/Frame 038562/0945 →
Assignment of Assignor's Interest
Nov 29, 2016
From: OWEN, DAVID M.
To: ULTRATECH, INC.
Reel/Frame 040445/0083 →
Assignment of Assignor's Interest
Dec 30, 2019
From: ULTRATECH, INC.
To: VEECO INSTRUMENTS INC.
Reel/Frame 051446/0476 →