Assignment of Assignor's Interest

Recorded: 2016-11-29 Pages: 3

Assignor

OWEN, DAVID M.

Executed: 2016-11-16

Assignee

ULTRATECH, INC.

3050 ZANKER ROAD, SAN JOSE, CALIFORNIA, 95134

Covered Property (1)

Systems and methods of characterizing process-induced wafer shape for process control using CGS interferometry

Patent: 9,935,022 →

Application: 15/362,923 →

Publication: US 2017/0162456

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.