Patent Assignment
Reel/Frame 019253/0898
Assignment of Assignor's Interest
Recorded: 2007-05-01
Pages: 3
Assignors
HSU, CHUNG-WEI
Executed: 2007-04-05
VAN DEN BROEKE, DOUGLAS
Executed: 2007-04-03
CHEN, JANG FUNG
Executed: 2007-03-16
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, 5500 AH VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method for Improved Manufacturability and Patterning of Sub-Wavelength Contact Hole Mask
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.