Patent Assignment
Reel/Frame 019311/0380
Assignment of Assignor's Interest
Recorded: 2007-05-11
Pages: 2
Assignors
TAKAHASHI, KAZUE
Executed: 2007-03-23
TAMURA, HITOSHI
Executed: 2007-03-23
TANAKA, MOTOHIRO
Executed: 2007-03-23
YOSHIGAI, MOTOHIKO
Executed: 2007-03-23
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHINBASHI, 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.