Patent Assignment
Reel/Frame 019361/0706
Assignment of Assignor's Interest
Recorded: 2007-05-31
Pages: 4
Assignors
HERGENHAN, GUIDO
Executed: 2007-05-09
ZIENER, CHRISTIAN
Executed: 2007-05-09
FLOHRER, FRANK
Executed: 2007-05-09
Assignee
XTREME TECHNOLOGIES GMBH
GOESCHWITZER STRASSE 25, JENA, D-07745, GERMANY
Covered Property
(1)
Arrangement for the Generation of Extreme Ultraviolet Radiation by Means of Electric Discharge at Electrodes Which Can Be Regenerated
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.