Patent Assignment
Reel/Frame 019451/0467
Assignment of Assignor's Interest
Recorded: 2007-06-18
Pages: 8
Assignors
WEDOWSKI, MARCO
Executed: 2007-06-12
SCHOLZE, FRANK
Executed: 2007-06-05
TUEMMLER, JOHANNES
Executed: 2007-05-31
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Methods For Manufacturing Reflective Optical Element, Reflective Optical Elements, Euv-Lithography Apparatuses And Methods For Operating Optical Elements And Euv-Lithography Apparatuses, Methods For Determining The Phase Shift, Methods For Determining The Layer Thickness, And Apparatuses For Carrying Out The Methods
Application:
10/598,481 →
Publication:
US 2007/0285643
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.