IP Library › Patent Application 10598481
Patent Application Utility PCT National Stage
App. No. 10/598,481 · Confirmation No. 5997

Methods For Manufacturing Reflective Optical Element, Reflective Optical Elements, Euv-Lithography Apparatuses And Methods For Operating Optical Elements And Euv-Lithography Apparatuses, Methods For Determining The Phase Shift, Methods For Determining The Layer Thickness, And Apparatuses For Carrying Out The Methods

Applicant: Nadyeh Shariloo
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2011-04-25 SRNT Examiner's search strategy and results 3 View
2011-04-07 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2011-03-31 RCEX Request for Continued Examination (RCE) 3 View
2011-03-31 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2011-03-31 CLM Claims 4 View
2011-03-31 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2011-03-31 WFEE Fee Worksheet (SB06) 2 View
2011-03-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-03-31 WFEE Fee Worksheet (SB06) 1 View
2011-01-27 CTFR Final Rejection 11 View
2010-11-29 TRAN.LET Transmittal Letter 1 View
2010-11-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-11-29 TRAN.LET Transmittal Letter 1 View
2010-11-29 SPEC Specification 39 View
2010-11-29 CLM Claims 9 View
2010-11-29 DRW Drawings-only black and white line drawings 26 View
2010-11-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2010-11-15 CLM Claims 5 View
2010-11-15 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2010-11-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-11-15 WFEE Fee Worksheet (SB06) 1 View
2010-08-19 CTNF Non-Final Rejection 9 View
2010-08-19 892 List of references cited by examiner 1 View
2010-08-19 FOR Foreign Reference 62 View
2010-08-19 SRNT Examiner's search strategy and results 4 View
2010-08-19 SRFW Search information including classification, databases and other search related notes 1 View
2010-08-19 1449 List of References cited by applicant and considered by examiner 2 View
2010-08-19 BIB Bibliographic Data Sheet 1 View
2010-06-23 ELC. Response to Election / Restriction Filed 1 View
2010-06-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-05-25 CTRS Requirement for Restriction/Election 6 View
2008-03-18 APP.FILE.REC Filing Receipt 3 View
2008-01-14 CFILE Request for Corrected Filing Receipt 4 View
2008-01-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-12-13 NTC.PUB Notice of Publication 1 View
2007-11-06 APP.FILE.REC Filing Receipt 3 View
2007-09-11 CFILE Request for Corrected Filing Receipt 5 View
2007-09-11 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-09-10 IMIS Miscellaneous Internal Document 1 View
2007-09-07 APP.FILE.REC Filing Receipt 3 View
2007-09-07 M903 Notice of Designated Office (DO) / Elected Office (EO) Acceptance Mailed 2 View
2007-09-06 NTC.PUB.DATE Notice of New or Revised Publication Date 1 View
2007-06-29 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2007-06-29 FOR Foreign Reference 11 View
2007-06-29 FOR Foreign Reference 1 View
2007-06-29 FOR Foreign Reference 8 View
2007-06-29 FOR Foreign Reference 1 View
2007-06-29 FOR Foreign Reference 4 View
2007-06-29 FOR Foreign Reference 30 View
2007-06-29 N417 Electronic Filing System Acknowledgment Receipt 3 View
2007-06-18 PEFR Applicant Response to Pre-Exam Formalities Notice 3 View
2007-06-18 OATH Oath or Declaration filed 6 View
2007-06-18 WFEE Fee Worksheet (SB06) 2 View
2007-06-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-06-18 WFEE Fee Worksheet (SB06) 1 View
2007-05-10 M905 Notice of DO/EO Missing Requirements Mailed 2 View
2007-05-04 WFEE Fee Worksheet (SB06) 1 View
2007-05-04 IMIS Miscellaneous Internal Document 1 View
2007-05-04 WCLM Claims Worksheet (PTO-2022) 1 View
2006-09-22 A.PE Preliminary Amendment 1 View
2006-09-22 CLM Claims 5 View
2006-09-22 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2006-09-22 WFEE Fee Worksheet (SB06) 2 View
2006-09-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-09-22 WFEE Fee Worksheet (SB06) 1 View
2006-08-31 TRNA Transmittal of New Application 2 View
2006-08-31 ABST Abstract 2 View
2006-08-31 SPEC Specification 54 View
2006-08-31 CLM Claims 16 View
2006-08-31 DRW Drawings-only black and white line drawings 34 View
2006-08-31 ADS Application Data Sheet 5 View
2006-08-31 A.PE Preliminary Amendment 1 View
2006-08-31 SPEC Specification 1 View
2006-08-31 CLM Claims 1 View
2006-08-31 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2006-08-31 WFEE Fee Worksheet (SB06) 2 View
2006-08-31 N417 Electronic Filing System Acknowledgment Receipt 3 View
2006-08-31 136A Authorization for Extension of Time all replies 2 View
2006-08-31 ABST Abstract 2 View
2006-08-31 SPEC Specification 54 View
2006-08-31 CLM Claims 16 View
2006-08-31 DRW Drawings-only black and white line drawings 34 View
2006-08-31 FRPR Certified Copy of Foreign Priority Application 80 View
2006-08-31 FRPR Certified Copy of Foreign Priority Application 54 View
2006-08-31 FRPR Certified Copy of Foreign Priority Application 81 View
2006-08-31 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/598,481
Filed
2007-06-18
Effective Filing
2006-08-31
Pub. No.
US20070285643A1
Art Unit
2882